Intraocular Pressure Sensor

This project discusses an implantable micro electro mechanical system (MEMS) devise for measuring and monitoring the intraocular pressure of eye fluid. The project focuses on the pressure sensor, which is considered the main part of the system. The theory of pressure sensor, modelling, simulation and implementation of the sensor are discussed.

This paper shows the integration of different physics in Finite Element Analysis (FEA) COMSOL software, which enabled us to reproduce and validate previous research, by showing the relation of pressure and deflection, as well as the relation between pressure and capacitance. The objective of the work is to achieve high-aspect-ratio microstructures and demonstrated the process with the design of a pressure sensor for an intraocular micro-system. Our pressure sensor operates in touch-mode with a sensitivity of 33.3fF/mmHg and linear response and different physical interactions are shown in the paper.

Full paper: Download