XY-Stage Chevron Actuator

This project focuses on the study and design of MEMS XY-Stage Chevron Actuator, modeled by L-Edit, which is ready to be manufactured by PolyMUMPs fabrication process. Several models are developed for the objective of creating an XY positioning platform, Chevron thermal actuators are utilized to move the stage platform. A final model is chosen based on the performance of the actuation as well as the efficiency in fabrication process.